Inventor
TANABE MASAHARU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TANABE MASAHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
7 patentsUS11600469B2Mar 7, 2023
Plasma processing apparatus
CANON ANELVA CORP5 citations84
US11569070B2Jan 31, 2023
Plasma processing apparatus
CANON ANELVA CORP9 citations84
US11961710B2Apr 16, 2024
Plasma processing apparatus
CANON ANELVA CORP3 citations73
US11784030B2Oct 10, 2023
Plasma processing apparatus
CANON ANELVA CORP4 citations73
US11626270B2Apr 11, 2023
Plasma processing apparatus
CANON ANELVA CORP2 citations71
US11600466B2Mar 7, 2023
Plasma processing apparatus, plasma processing method, and memory medium
CANON ANELVA CORP3 citations71
US11756773B2Sep 12, 2023
Plasma processing apparatus
CANON ANELVA CORP1 citations61