Inventor
GALBURT VLADIMIR
US9 patents
⚠️ This page may combine multiple inventors who share the name “GALBURT VLADIMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS7229504B2Jun 12, 2007
Methods and apparatus for determining scrubber brush pressure
APPLIED MATERIALS INC25 citations91
US6986185B2Jan 17, 2006
Methods and apparatus for determining scrubber brush pressure
APPLIED MATERIALS INC25 citations91
US7655565B2Feb 2, 2010
Electroprocessing profile control
APPLIED MATERIALS INC8 citations84
US7507296B2Mar 24, 2009
Methods and apparatus for determining scrubber brush pressure
APPLIED MATERIALS INC12 citations83
US12251788B2Mar 18, 2025
Polishing head with local wafer pressure
APPLIED MATERIALS INC0 citations62
US11986923B2May 21, 2024
Polishing head with local wafer pressure
APPLIED MATERIALS INC0 citations62
US7709382B2May 4, 2010
Electroprocessing profile control
APPLIED MATERIALS INC2 citations62
US11780049B2Oct 10, 2023
Polishing carrier head with multiple angular pressurizable zones
APPLIED MATERIALS INC0 citations51