Inventor

BALON FRANTISEK

CH6 patents

⚠️ This page may combine multiple inventors who share the name “BALON FRANTISEK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KADLEC STANISLAV

2 patents

US8574409B2Nov 5, 2013

Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source

KADLEC STANISLAV18 citations89

US8246794B2Aug 21, 2012

Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source

KADLEC STANISLAV1 citations49

EVATEC AG

2 patents

US11145495B2Oct 12, 2021

Vacuum treatment chamber and method of manufacturing a vacuum treated plate-shaped substrate

EVATEC AG0 citations48

US11387079B2Jul 12, 2022

Plasma etch chamber and method of plasma etching

EVATEC AG0 citations41

VAT HOLDING AG

2 patents

US12154802B2Nov 26, 2024

Method for monitoring, determining the position of, and positioning a pin-lifting system

VAT HOLDING AG0 citations45

US12060951B2Aug 13, 2024

Adjustment device for a vacuum area with pressure measuring functionality

VAT HOLDING AG0 citations45