Inventor

SUNG DOUG YONG

KR18 patents

⚠️ This page may combine multiple inventors who share the name “SUNG DOUG YONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUNG DOUG YONG

SAMSUNG ELECTRONICS CO LTD

Pulse plasma apparatus and drive method thereof

Plasma processing apparatus

Diagnosis system for pulsed plasma

Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system

Apparatus for monitoring process chamber

Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same

Semiconductor manufacturing device and method of operating the same

Plasma processing apparatus

Apparatus for monitoring process chamber

Plasma processing equipment

Plasma processing equipment

Inductively coupled plasma processing apparatus

Plasma processing apparatus and method of manufacture

Plasma etching apparatus and method for operating the same

Electrostatic chuck and plasma apparatus for processing substrates having the same

Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system

Plasma processing device

SUNG DOUG YONG

Etching apparatus and method for semiconductor device