Inventor
MATSUI SHINJI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “MATSUI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
4 patentsUS4605566AAug 12, 1986
Method for forming thin films by absorption
NEC CORP32 citations91
US6758900B1Jul 6, 2004
Micro three-dimensional structure, production method therefor and production device therefor
NEC CORP11 citations72
US5466548ANov 14, 1995
Method for producing nanometer order dot pattern by electron holography and drawing apparatus for the same
NEC CORP13 citations72
US5838468ANov 17, 1998
Method and system for forming fine patterns using hologram
NEC CORP10 citations71