Inventor
LUND WORM
US10 patents
⚠️ This page may combine multiple inventors who share the name “LUND WORM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
4 patentsUS6203582B1Mar 20, 2001
Modular semiconductor workpiece processing tool
SEMITOOL INC154 citations98
US6440178B2Aug 27, 2002
Modular semiconductor workpiece processing tool
SEMITOOL INC82 citations97
US7074246B2Jul 11, 2006
Modular semiconductor workpiece processing tool
SEMITOOL INC8 citations73
US7005010B2Feb 28, 2006
Multi-process system
SEMITOOL INC3 citations61