Inventor
COLE SR KENNETH M
US11 patents
⚠️ This page may combine multiple inventors who share the name “COLE SR KENNETH M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEMPTRONIC CORP
10 patentsUS6415858B1Jul 9, 2002
Temperature control system for a workpiece chuck
TEMPTRONIC CORP127 citations97
US6540014B2Apr 1, 2003
Workpiece chuck
TEMPTRONIC CORP55 citations95
US6073681AJun 13, 2000
Workpiece chuck
TEMPTRONIC CORP64 citations95
US6019164AFeb 1, 2000
Workpiece chuck
TEMPTRONIC CORP44 citations94
US6802368B2Oct 12, 2004
Temperature control system for a workpiece chuck
TEMPTRONIC CORP20 citations91
US6700099B2Mar 2, 2004
Wafer chuck having thermal plate with interleaved heating and cooling elements, interchangeable top surface assemblies and hard coated layer surfaces
TEMPTRONIC CORP43 citations91
US6375176B1Apr 23, 2002
Workpiece chuck with guard layer having vacuum distribution pattern
TEMPTRONIC CORP35 citations90
US7629533B2Dec 8, 2009
Temperature-controlled enclosures and temperature control system using the same
TEMPTRONIC CORP12 citations80
US6969830B2Nov 29, 2005
Wafer chuck having thermal plate with interleaved heating and cooling elements
TEMPTRONIC CORP1 citations51
US10060668B2Aug 28, 2018
Temperature-controlled enclosures and temperature control system using the same
TEMPTRONIC CORP0 citations48