Inventor
ANTONELL MICHAEL
US5 patents
Patents
5 patentsUS6606371B2Aug 12, 2003
X-ray system
AGERE SYSTEMS INC11 citations72
US6695572B2Feb 24, 2004
Method and apparatus for minimizing semiconductor wafer contamination
AGERE SYSTEMS INC4 citations57
US6899596B2May 31, 2005
Chemical mechanical polishing of dual orientation polycrystalline materials
AGERE SYSTEMS INC3 citations53
US6713409B2Mar 30, 2004
Semiconductor manufacturing using modular substrates
AGERE SYSTEMS INC0 citations50
US6534851B1Mar 18, 2003
Modular semiconductor substrates
AGERE SYSTEMS INC0 citations50