Inventor
MATSUYAMA YUKIO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “MATSUYAMA YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
14 patentsUS5986263ANov 16, 1999
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD164 citations99
US6587581B1Jul 1, 2003
Visual inspection method and apparatus therefor
HITACHI LTD118 citations98
US6172365B1Jan 9, 2001
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD48 citations96
US5293538AMar 8, 1994
Method and apparatus for the inspection of defects
HITACHI LTD80 citations96
US5780866AJul 14, 1998
Method and apparatus for automatic focusing and a method and apparatus for three dimensional profile detection
HITACHI LTD62 citations95
US4628531ADec 9, 1986
Pattern checking apparatus
HITACHI LTD100 citations95
US6717142B2Apr 6, 2004
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD16 citations93
US6373054B2Apr 16, 2002
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD23 citations93
US6249598B1Jun 19, 2001
Solder testing apparatus
HITACHI LTD21 citations92
US6333992B1Dec 25, 2001
Defect judgement processing method and apparatus
HITACHI LTD47 citations91
US5763123AJun 9, 1998
Method for producing thin-film substrate
HITACHI LTD27 citations91
US4860371AAug 22, 1989
Method and apparatus for detecting pattern defects
HITACHI LTD40 citations91
US6828554B2Dec 7, 2004
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD11 citations82
US7122796B2Oct 17, 2006
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD4 citations74