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Inventor
SUN ERIC YONGJIAN
US
2 patents
Patents
2 patents
US7560225B2
Jul 14, 2009
Method of forming uniform features using photoresist
HITACHI GLOBAL STORAGE TECH
6 citations
58
US7300556B2
Nov 27, 2007
Method for depositing a thin film adhesion layer
HITACHI GLOBAL STORAGE TECH
4 citations
58