Inventor
CHEN ALEK CHI-HENG
TW4 patents
⚠️ This page may combine multiple inventors who share the name “CHEN ALEK CHI-HENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS7582413B2Sep 1, 2009
Substrate, method of exposing a substrate, machine readable medium
ASML NETHERLANDS BV9 citations78
US8945800B2Feb 3, 2015
Method of preparing a pattern, method of forming a mask set, device manufacturing method and computer program
ASML NETHERLANDS BV3 citations58
US7713682B2May 11, 2010
Substrate, method of exposing a substrate, machine readable medium
ASML NETHERLANDS BV0 citations46