Inventor

GREENEICH JAMES SHERWOOD

US3 patents

⚠️ This page may combine multiple inventors who share the name “GREENEICH JAMES SHERWOOD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7548302B2Jun 16, 2009

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV12 citations82

US7317506B2Jan 8, 2008

Variable illumination source

ASML NETHERLANDS BV2 citations60

TROOST KARS ZEGER

1 patent

US8264667B2Sep 11, 2012

Lithographic apparatus and device manufacturing method using interferometric and other exposure

TROOST KARS ZEGER3 citations58