Inventor
ZIMMERMAN RICHARD CARL
US8 patents
⚠️ This page may combine multiple inventors who share the name “ZIMMERMAN RICHARD CARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZIMMERMAN RICHARD CARL
3 patentsUS8629973B2Jan 14, 2014
Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation
ZIMMERMAN RICHARD CARL13 citations78
US9075324B2Jul 7, 2015
Beam positioning and pointing
ZIMMERMAN RICHARD CARL4 citations70
US9134620B2Sep 15, 2015
Double EUV illumination uniformity correction system and method
ZIMMERMAN RICHARD CARL4 citations68