Inventor

STONE ELIZABETH

US3 patents

⚠️ This page may combine multiple inventors who share the name “STONE ELIZABETH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

2 patents

US7173688B2Feb 6, 2007

Method for calculating an intensity integral for use in lithography systems

ASML HOLDING NV12 citations81

US7333176B2Feb 19, 2008

De-focus uniformity correction

ASML HOLDING NV3 citations60

ZIMMERMAN RICHARD CARL

1 patent

US8629973B2Jan 14, 2014

Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation

ZIMMERMAN RICHARD CARL13 citations78