Inventor

CSISZAR SZILARD ISTVAN

NL2 patents

⚠️ This page may combine multiple inventors who share the name “CSISZAR SZILARD ISTVAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZIMMERMAN RICHARD CARL

1 patent

US8629973B2Jan 14, 2014

Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation

ZIMMERMAN RICHARD CARL13 citations78

BUURMAN ERIK PETRUS

1 patent

US8663881B2Mar 4, 2014

Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device

BUURMAN ERIK PETRUS7 citations74