Inventor

VLADIMIRSKY OLGA

US2 patents

⚠️ This page may combine multiple inventors who share the name “VLADIMIRSKY OLGA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV LOUISIANA STATE

1 patent

US6093520AJul 25, 2000

High aspect ratio microstructures and methods for manufacturing microstructures

UNIV LOUISIANA STATE55 citations86

ZIMMERMAN RICHARD CARL

1 patent

US8629973B2Jan 14, 2014

Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation

ZIMMERMAN RICHARD CARL13 citations78