Inventor

KIM SUNG-HYUCK

KR5 patents

⚠️ This page may combine multiple inventors who share the name “KIM SUNG-HYUCK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US7432022B2Oct 7, 2008

Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the same

SAMSUNG ELECTRONICS CO LTD4 citations58

US7335449B2Feb 26, 2008

Masks each having a central main pattern region and a peripheral phantom pattern region with light-transmitting features in both pattern regions having the shame shape and pitch and methods of manufacturing the same

SAMSUNG ELECTRONICS CO LTD1 citations49

US7595136B2Sep 29, 2009

Method of fabricating chrome-less phase shift mask

SAMSUNG ELECTRONICS CO LTD0 citations37

KIM SUNG-HYUCK

1 patent

US8795929B2Aug 5, 2014

Pellicle having buffer zone and photomask structure having pellicle

KIM SUNG-HYUCK0 citations39

YU SANG-YONG

1 patent

US8304173B2Nov 6, 2012

Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor device

YU SANG-YONG0 citations26