Inventor
OSHIKIRI TOMOYA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “OSHIKIRI TOMOYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI RAYON CO
2 patentsYASUDA ATSUSHI
2 patentsUS9109060B2Aug 18, 2015
Method for producing polymer, polymer for lithography, resist composition, and method for producing substrate
YASUDA ATSUSHI0 citations45
US9733564B2Aug 15, 2017
Copolymers for lithography and method for producing same, resist composition, method for producing substrate with pattern formed thereupon, method for evaluating copolymers, and method for analyzing copolymer compositions
YASUDA ATSUSHI0 citations36