Inventor
YANG JENSEN
TW4 patents
Patents
4 patentsUS9761411B2Sep 12, 2017
System and method for maskless direct write lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49
US10804066B2Oct 13, 2020
Data processing of electron beam lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10446358B2Oct 15, 2019
Data processing of electron beam lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10049851B2Aug 14, 2018
Data processing of electron beam lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48