Inventor

YUMIYAMA TOSHIO

JP9 patents

⚠️ This page may combine multiple inventors who share the name “YUMIYAMA TOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NINOMIYA SHIRO

2 patents

US8772741B2Jul 8, 2014

Ion implantation method and ion implantation apparatus

NINOMIYA SHIRO7 citations80

US8735855B2May 27, 2014

Ion beam irradiation system and ion beam irradiation method

NINOMIYA SHIRO3 citations60

SEN CORP

2 patents

US8692216B2Apr 8, 2014

Ion implantation apparatus and control method thereof

SEN CORP11 citations80

US9305784B2Apr 5, 2016

Ion implantation method and ion implantation apparatus

SEN CORP5 citations70

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD

2 patents

US10217607B2Feb 26, 2019

Ion implantation apparatus and ion implantation method

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD3 citations71

US12469677B2Nov 11, 2025

Ion implantation method, ion implanter, and method for manufacturing semiconductor device

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD0 citations51

SEN CORP AN SHI & AXCELIS CO

1 patent

US7851772B2Dec 14, 2010

Ion implantation apparatus and ion implantation method

SEN CORP AN SHI & AXCELIS CO6 citations61

SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD

1 patent

US9379030B2Jun 28, 2016

Ion implantation method and ion implantation apparatus

SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD1 citations47

SUMITOMO HEAVY IND ION TECH CO LTD

1 patent

US9564289B2Feb 7, 2017

Ion implanter and method of controlling the same

SUMITOMO HEAVY IND ION TECH CO LTD0 citations35