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Inventor
SAKAI ATSUYUKI
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “SAKAI ATSUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CKD CORP
2 patents
US10309428B2
Jun 4, 2019
Method for controlling gas-pressure-driven apparatus and gas-pressure-driven apparatus
CKD CORP
2 citations
68
US10302077B2
May 28, 2019
Liquid supply system and method for controlling liquid supply system
CKD CORP
0 citations
37
HITACHI LTD
1 patent
US5134962A
Aug 4, 1992
Spin coating apparatus
HITACHI LTD
146 citations
95
OCTEC INC
1 patent
US7686588B2
Mar 30, 2010
Liquid chemical supply system having a plurality of pressure detectors
OCTEC INC
11 citations
81