Inventor
NAMIKI TAKUMI
JP10 patents
Patents
10 patentsUS10988649B2Apr 27, 2021
Method for imparting water repellency to substrate, surface treatment agent, and method for suppressing collapse of organic pattern or inorganic pattern in cleaning substrate surface with cleaning liquid
TOKYO OHKA KOGYO CO LTD0 citations61
US9063430B2Jun 23, 2015
Coating agent for forming fine pattern
TOKYO OHKA KOGYO CO LTD2 citations60
US11965111B2Apr 23, 2024
Surface treatment agent and surface treatment method
TOKYO OHKA KOGYO CO LTD1 citations55
US11358976B2Jun 14, 2022
Surface treatment agent, surface treatment method, and area selective deposition method
TOKYO OHKA KOGYO CO LTD1 citations55
US12593639B2Mar 31, 2026
Method for processing substrate, chemical solution, and method for providing chemical solution
TOKYO OHKA KOGYO CO LTD0 citations51
US10961422B2Mar 30, 2021
Surface treatment liquid, surface treatment method, and method for suppressing pattern collapse
TOKYO OHKA KOGYO CO LTD0 citations48
US8980534B2Mar 17, 2015
Method for forming fine pattern, and coating agent for pattern fining
TOKYO OHKA KOGYO CO LTD0 citations46
US10597609B2Mar 24, 2020
Cleaning liquid, anticorrosion agent, and method for manufacturing the same
TOKYO OHKA KOGYO CO LTD0 citations45
US10597616B2Mar 24, 2020
Cleaning liquid and method for manufacturing the same
TOKYO OHKA KOGYO CO LTD0 citations45
US9417532B2Aug 16, 2016
Coating agent for forming fine pattern
TOKYO OHKA KOGYO CO LTD0 citations44