Inventor
HUANG HELIN
US7 patents
⚠️ This page may combine multiple inventors who share the name “HUANG HELIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
6 patentsUS9631122B1Apr 25, 2017
Tungsten-processing slurry with cationic surfactant
CABOT MICROELECTRONICS CORP19 citations81
US10066126B2Sep 4, 2018
Tungsten processing slurry with catalyst
CABOT MICROELECTRONICS CORP5 citations67
US11043151B2Jun 22, 2021
Surface treated abrasive particles for tungsten buff applications
CABOT MICROELECTRONICS CORP1 citations59
US11597854B2Mar 7, 2023
Method to increase barrier film removal rate in bulk tungsten slurry
CABOT MICROELECTRONICS CORP0 citations57
US10522341B2Dec 31, 2019
Composition and method for removing residue from chemical-mechanical planarization substrate
CABOT MICROELECTRONICS CORP0 citations50
US9771496B2Sep 26, 2017
Tungsten-processing slurry with cationic surfactant and cyclodextrin
CABOT MICROELECTRONICS CORP1 citations49