Inventor

VAYYAPRON SHOJU

IN4 patents

Patents

4 patents

US11053590B2Jul 6, 2021

Nozzle for uniform plasma processing

APPLIED MATERIALS INC3 citations70

US10465288B2Nov 5, 2019

Nozzle for uniform plasma processing

APPLIED MATERIALS INC4 citations70

US10325790B2Jun 18, 2019

Methods and apparatus for correcting substrate deformity

APPLIED MATERIALS INC3 citations67

US10777442B2Sep 15, 2020

Hybrid substrate carrier

APPLIED MATERIALS INC0 citations42