Inventor
FIRNKES MATTHIAS
DE14 patents
⚠️ This page may combine multiple inventors who share the name “FIRNKES MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH
8 patentsUS11094501B2Aug 17, 2021
Secondary charged particle imaging system
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH3 citations69
US12386164B2Aug 12, 2025
Method of determining a brightness of a charged particle beam, method of determining a size of a source of the charged particle beam, and charged particle beam imaging device
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations58
US11810753B2Nov 7, 2023
Methods of determining aberrations of a charged particle beam, and charged particle beam system
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations58
US11791128B2Oct 17, 2023
Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations58
US11177114B1Nov 16, 2021
Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangement
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations57
US10991544B2Apr 27, 2021
Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations56
US10103004B2Oct 16, 2018
System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations51
US11501947B1Nov 15, 2022
Aberration corrector and method of aligning aberration corrector
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations46
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH
4 patentsUS9666405B1May 30, 2017
System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH13 citations83
US9666406B1May 30, 2017
Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH19 citations83
US9472373B1Oct 18, 2016
Beam separator device, charged particle beam device and methods of operating thereof
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH7 citations80
US9805908B2Oct 31, 2017
Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH1 citations51