Inventor
LAMPERSBERGER FLORIAN
DE4 patents
Patents
4 patentsUS11094501B2Aug 17, 2021
Secondary charged particle imaging system
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH3 citations69
US11177114B1Nov 16, 2021
Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangement
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations57
US10991544B2Apr 27, 2021
Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations56
US11501947B1Nov 15, 2022
Aberration corrector and method of aligning aberration corrector
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations46