Inventor
WILBY ANTHONY PAUL
GB5 patents
Patents
5 patentsUS10153135B2Dec 11, 2018
Plasma etching apparatus
SPTS TECHNOLOGIES LTD2 citations67
US11127568B2Sep 21, 2021
Plasma etching apparatus
SPTS TECHNOLOGIES LTD1 citations59
US10622193B2Apr 14, 2020
Plasma etching apparatus
SPTS TECHNOLOGIES LTD1 citations59
US9728432B2Aug 8, 2017
Method of degassing
SPTS TECHNOLOGIES LTD1 citations48
US12555743B2Feb 17, 2026
Plasma producing apparatus
SPTS TECHNOLOGIES LTD0 citations44