Inventor
AYRES MARTIN
GB4 patents
Patents
4 patentsUS11643744B2May 9, 2023
Apparatus for electrochemically processing semiconductor substrates
SPTS TECHNOLOGIES LTD0 citations57
US11236433B2Feb 1, 2022
Apparatus and method for processing a substrate
SPTS TECHNOLOGIES LTD0 citations57
US11066754B2Jul 20, 2021
Apparatus for electrochemically processing semiconductor substrates
SPTS TECHNOLOGIES LTD0 citations57
US12590760B2Mar 31, 2026
Spin rinse dryer with improved drying characteristics
SPTS TECHNOLOGIES LTD0 citations45