Inventor
ROY SARATHI
NL15 patents
Patents
15 patentsUS12044979B2Jul 23, 2024
Computational metrology based sampling scheme
ASML NETHERLANDS BV2 citations72
US11635698B2Apr 25, 2023
Computational metrology based sampling scheme
ASML NETHERLANDS BV2 citations72
US11994845B2May 28, 2024
Determining a correction to a process
ASML NETHERLANDS BV2 citations71
US11092902B2Aug 17, 2021
Method and apparatus for detecting substrate surface variations
ASML NETHERLANDS BV2 citations70
US11448973B2Sep 20, 2022
Computational metrology based correction and control
ASML NETHERLANDS BV2 citations68
US12493285B2Dec 9, 2025
Determining a correction to a process
ASML NETHERLANDS BV0 citations60
US12493248B2Dec 9, 2025
Method for optimizing a sampling scheme and associated apparatuses
ASML NETHERLANDS BV0 citations60
US12429781B2Sep 30, 2025
Metrology method and associated metrology and lithographic apparatuses
ASML NETHERLANDS BV0 citations60
US11086305B2Aug 10, 2021
Determining a correction to a process
ASML NETHERLANDS BV0 citations60
US12306545B2May 20, 2025
Determining lithographic matching performance
ASML NETHERLANDS BV0 citations59
US12366809B2Jul 22, 2025
Methods and apparatus for controlling a lithographic process
ASML NETHERLANDS BV0 citations56
US11520238B2Dec 6, 2022
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56
US11281110B2Mar 22, 2022
Methods using fingerprint and evolution analysis
ASML NETHERLANDS BV0 citations56
US11150562B2Oct 19, 2021
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56
US11243470B2Feb 8, 2022
Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method
ASML NETHERLANDS BV0 citations49