Inventor
HASSAN JAVATHU K
9 patents
Patents
9 patentsUS4270999AJun 2, 1981
Method and apparatus for gas feed control in a dry etching process
IBM71 citations95
US4165132AAug 21, 1979
Pneumatic control of the motion of objects suspended on an air film
IBM96 citations95
US3968885AJul 13, 1976
Method and apparatus for handling workpieces
IBM215 citations95
US4348139ASep 7, 1982
Gas film wafer transportation system
IBM44 citations91
US4257637AMar 24, 1981
Contactless air film lifting device
IBM33 citations91
US4016396AApr 5, 1977
Precision tool and workpiece positioning apparatus
IBM26 citations78
US4395165AJul 26, 1983
Chip shuttle track
IBM25 citations77
US4474397AOct 2, 1984
Pick-up head utilizing aspirated air flow
IBM18 citations72
US4019015AApr 19, 1977
Precision tool and workpiece positioning apparatus with ringout detection
IBM8 citations69