Inventor
DESILETS BRIAN H
8 patents
Patents
8 patentsUS4600464AJul 15, 1986
Plasma etching reactor with reduced plasma potential
IBM121 citations94
US5235206AAug 10, 1993
Vertical bipolar transistor with recessed epitaxially grown intrinsic base region
IBM39 citations92
US5137840AAug 11, 1992
Vertical bipolar transistor with recessed epitaxially grown intrinsic base region
IBM46 citations92
US4965217AOct 23, 1990
Method of making a lateral transistor
IBM24 citations92
US4826564AMay 2, 1989
Method of selective reactive ion etching of substrates
IBM33 citations90
US4384938AMay 24, 1983
Reactive ion etching chamber
IBM33 citations86
US5043786AAug 27, 1991
Lateral transistor and method of making same
IBM8 citations73
US4362596ADec 7, 1982
Etch end point detector using gas flow changes
IBM10 citations71