Inventor

GUNTHER THOMAS A

3 patents

Patents

3 patents

US4600464AJul 15, 1986

Plasma etching reactor with reduced plasma potential

IBM121 citations94

US4384938AMay 24, 1983

Reactive ion etching chamber

IBM33 citations86

US4362596ADec 7, 1982

Etch end point detector using gas flow changes

IBM10 citations71