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Inventor
FUKUWATARI ICHIRO
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “FUKUWATARI ICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
1 patent
US4718539A
Jan 12, 1988
Conveyor means
HITACHI LTD
20 citations
73
FUKUWATARI ICHIRO
1 patent
US4877123A
Oct 31, 1989
Conveyor means for wafers
FUKUWATARI ICHIRO
18 citations
68
HITACHI KIDEN KOGYO KABUSHIKIK
1 patent
US4652800A
Mar 24, 1987
Moving object stop control method by a linear motor
HITACHI KIDEN KOGYO KABUSHIKIK
10 citations
65
HITACHI KIDEN KOGYO KK
1 patent
US4662282A
May 5, 1987
Switching device for pneumatic conveyance linear motor actuated
HITACHI KIDEN KOGYO KK
6 citations
59
HITACHI PLANT TECHNOLOGIES LTD
1 patent
US7547175B2
Jun 16, 2009
Transfer device for substrate and storing device and hand therein, and substrate handled by the device
HITACHI PLANT TECHNOLOGIES LTD
5 citations
52