Inventor
FUSHIMI SATORU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “FUSHIMI SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
7 patentsUS4791586ADec 13, 1988
Method of and apparatus for checking geometry of multi-layer patterns for IC structures
HITACHI LTD99 citations96
US5051585ASep 24, 1991
Apparatus and method of pattern detection based on a scanning transmission electron microscope
HITACHI LTD73 citations95
US4814615AMar 21, 1989
Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure
HITACHI LTD31 citations92
US4614430ASep 30, 1986
Method of detecting pattern defect and its apparatus
HITACHI LTD40 citations92
US4508453AApr 2, 1985
Pattern detection system
HITACHI LTD48 citations92
US4990776AFeb 5, 1991
Electron microscope
HITACHI LTD47 citations91
US5157735AOct 20, 1992
Chipping detection system and method
HITACHI LTD12 citations74