Inventor
SWINNEY TIMOTHY C
US18 patents
Patents
18 patentsUS11656139B2May 23, 2023
Thermal conductivity gauge
MKS INSTR INC4 citations85
US10845263B2Nov 24, 2020
Thermal conductivity gauge
MKS INSTR INC6 citations83
US9671302B2Jun 6, 2017
Cold cathode ionization vacuum gauge
MKS INSTR INC11 citations82
US11946823B2Apr 2, 2024
Thermal conductivity gauge
MKS INSTR INC3 citations74
US11808643B2Nov 7, 2023
Thermal conductivity pressure gauge with heated chamber wall
MKS INSTR INC4 citations74
US10948456B1Mar 16, 2021
Gas analyzer system with ion source
MKS INSTR INC4 citations72
US10876917B2Dec 29, 2020
Polymer composite vacuum components
MKS INSTR INC3 citations71
US10359332B2Jul 23, 2019
Polymer composite vacuum components
MKS INSTR INC3 citations71
US9714919B2Jul 25, 2017
Trace gas concentration in ART MS traps
MKS INSTR INC3 citations70
US12181366B2Dec 31, 2024
Thermal conductivity gauge
MKS INSTR INC0 citations62
US12123794B2Oct 22, 2024
Pirani gauge with model of power dissipation
MKS INSTR INC0 citations61
US11366036B2Jun 21, 2022
Polymer composite vacuum components
MKS INSTR INC0 citations60
US9040907B2May 26, 2015
Method and apparatus for tuning an electrostatic ion trap
MKS INSTR INC3 citations56
US10969290B2Apr 6, 2021
Anode electrode shield for inverted magnetron cold cathode ionization gauge
MKS INSTR INC0 citations51
US10928265B2Feb 23, 2021
Gas analysis with an inverted magnetron source
MKS INSTR INC0 citations51
US10352811B2Jul 16, 2019
Cold cathode ionization vacuum gauge
MKS INSTR INC0 citations48
US9797797B2Oct 24, 2017
Cold cathode ionization vacuum gauge
MKS INSTR INC0 citations48
US10337940B2Jul 2, 2019
Cold cathode ionization vacuum gauge with multiple cathodes
MKS INSTR INC0 citations40