Inventor
ASHIDA YOSHINORI
JP4 patents
Patents
4 patentsUS5677236AOct 14, 1997
Process for forming a thin microcrystalline silicon semiconductor film
MITSUI TOATSU CHEMICALS175 citations95
US5194398AMar 16, 1993
Semiconductor film and process for its production
MITSUI TOATSU CHEMICALS102 citations95
US4585671AApr 29, 1986
Formation process of amorphous silicon film
MITSUI TOATSU CHEMICALS132 citations94
US5248348ASep 28, 1993
Amorphous silicon solar cell and method for manufacturing the same
MITSUI TOATSU CHEMICALS51 citations91