Inventor
NAULLEAU PATRICK P
US14 patents
⚠️ This page may combine multiple inventors who share the name “NAULLEAU PATRICK P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUV LLC
7 patentsUS6798494B2Sep 28, 2004
Apparatus for generating partially coherent radiation
EUV LLC15 citations83
US6768567B2Jul 27, 2004
Synchrotron-based EUV lithography illuminator simulator
EUV LLC13 citations83
US6861273B2Mar 1, 2005
Method of fabricating reflection-mode EUV diffusers
EUV LLC11 citations74
US7027226B2Apr 11, 2006
Diffractive optical element for extreme ultraviolet wavefront control
EUV LLC7 citations73
US7016030B2Mar 21, 2006
Extended surface parallel coating inspection method
EUV LLC7 citations73
US6927887B2Aug 9, 2005
Holographic illuminator for synchrotron-based projection lithography systems
EUV LLC11 citations73
US6859263B2Feb 22, 2005
Apparatus for generating partially coherent radiation
EUV LLC8 citations73
UNIV CALIFORNIA
4 patentsUS6392792B1May 21, 2002
Method of fabricating reflection-mode EUV diffraction elements
UNIV CALIFORNIA73 citations95
US6233056B1May 15, 2001
Interferometric at-wavelength flare characterization of EUV optical systems
UNIV CALIFORNIA70 citations95
US6327102B1Dec 4, 2001
Miniature self-contained vacuum compatible electronic imaging microscope
UNIV CALIFORNIA18 citations79
US6707560B1Mar 16, 2004
Dual-domain lateral shearing interferometer
UNIV CALIFORNIA12 citations73