Inventor
KAGATSUME AKIKO
JP4 patents
Patents
4 patentsUS6403479B1Jun 11, 2002
Process for producing semiconductor and apparatus for production
HITACHI LTD17 citations81
US6656838B2Dec 2, 2003
Process for producing semiconductor and apparatus for production
HITACHI LTD11 citations71
US8344382B2Jan 1, 2013
Semiconductor device, manufacturing method thereof, and display apparatus using the semiconductor device
HITACHI LTD0 citations51
US11380518B2Jul 5, 2022
Measurement system and method for setting observation conditions of measurement apparatus
HITACHI LTD0 citations47