Inventor
KENAN BOAZ
IL16 patents
⚠️ This page may combine multiple inventors who share the name “KENAN BOAZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS6369888B1Apr 9, 2002
Method and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC118 citations98
US6268093B1Jul 31, 2001
Method for reticle inspection using aerial imaging
APPLIED MATERIALS INC205 citations98
US6466315B1Oct 15, 2002
Method and system for reticle inspection by photolithography simulation
APPLIED MATERIALS INC131 citations97
US7133548B2Nov 7, 2006
Method and apparatus for reticle inspection using aerial imaging
APPLIED MATERIALS INC53 citations96
US6798505B2Sep 28, 2004
Method and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC20 citations92
US6587194B2Jul 1, 2003
Method of and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC19 citations92
US6429931B1Aug 6, 2002
Method and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC20 citations92
US6924891B2Aug 2, 2005
Method and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC16 citations91
US7072502B2Jul 4, 2006
Alternating phase-shift mask inspection method and apparatus
APPLIED MATERIALS INC32 citations90
US6556294B2Apr 29, 2003
Method of and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC6 citations73
US7463352B2Dec 9, 2008
Method and apparatus for article inspection including speckle reduction
APPLIED MATERIALS INC4 citations72
US7355689B2Apr 8, 2008
Automatic optical inspection using multiple objectives
APPLIED MATERIALS INC7 citations72
US7394531B2Jul 1, 2008
Apparatus and method for automatic optical inspection
APPLIED MATERIALS INC2 citations62