Inventor

HARVEY JR JERRY LYNN

US3 patents

Patents

3 patents

US7596718B2Sep 29, 2009

Ranged fault signatures for fault diagnosis

APPLIED MATERIALS INC30 citations90

US7587296B2Sep 8, 2009

Adaptive multivariate fault detection

APPLIED MATERIALS INC28 citations90

US7934125B2Apr 26, 2011

Ranged fault signatures for fault diagnosis

APPLIED MATERIALS INC9 citations82