Inventor

SHINANO YUJI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “SHINANO YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

2 patents

US7301615B2Nov 27, 2007

Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method

CANON KK14 citations81

US7230692B2Jun 12, 2007

Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method

CANON KK9 citations71

GYODA YUICHI

1 patent

US8450031B2May 28, 2013

Determination method, exposure method and storage medium

GYODA YUICHI2 citations60

YOSHIHARA TOSHIYUKI

1 patent

US8102503B2Jan 24, 2012

Exposure apparatus and method of manufacturing device

YOSHIHARA TOSHIYUKI3 citations57