Inventor

GEE PAUL EDWARD

US6 patents

⚠️ This page may combine multiple inventors who share the name “GEE PAUL EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BHATIA SIDHARTH

2 patents

US8664127B2Mar 4, 2014

Two silicon-containing precursors for gapfill enhancing dielectric liner

BHATIA SIDHARTH480 citations97

US8716154B2May 6, 2014

Reduced pattern loading using silicon oxide multi-layers

BHATIA SIDHARTH5 citations71

APPLIED MATERIALS INC

2 patents

US7994019B1Aug 9, 2011

Silicon-ozone CVD with reduced pattern loading using incubation period deposition

APPLIED MATERIALS INC40 citations91

US8012887B2Sep 6, 2011

Precursor addition to silicon oxide CVD for improved low temperature gapfill

APPLIED MATERIALS INC0 citations51

KWESKIN SASHA

2 patents

US8236708B2Aug 7, 2012

Reduced pattern loading using bis(diethylamino)silane (C8H22N2Si) as silicon precursor

KWESKIN SASHA27 citations89

US8476142B2Jul 2, 2013

Preferential dielectric gapfill

KWESKIN SASHA4 citations56