Inventor

YE JOHN ZHENG

US4 patents

⚠️ This page may combine multiple inventors who share the name “YE JOHN ZHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US9412579B2Aug 9, 2016

Methods and apparatus for controlling substrate uniformity

APPLIED MATERIALS INC16 citations92

US10177050B2Jan 8, 2019

Methods and apparatus for controlling substrate uniformity

APPLIED MATERIALS INC5 citations72

AXCELISS TECHNOLOGIES INC

1 patent

US6703628B2Mar 9, 2004

Method and system for ion beam containment in an ion beam guide

AXCELISS TECHNOLOGIES INC29 citations86

AXCELIS TECH INC

1 patent

US7701230B2Apr 20, 2010

Method and system for ion beam profiling

AXCELIS TECH INC2 citations60