Inventor
TSCHINDERLE ULRICH
AT9 patents
⚠️ This page may combine multiple inventors who share the name “TSCHINDERLE ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES AG
4 patentsUS10658204B2May 19, 2020
Spin chuck with concentrated center and radial heating
LAM RES AG7 citations79
US10056287B2Aug 21, 2018
Apparatus for treating surfaces of wafer-shaped articles
LAM RES AG0 citations50
US10134611B2Nov 20, 2018
Collector for use with an apparatus for treating wafer-shaped articles
LAM RES AG0 citations48
US11810796B2Nov 7, 2023
Wafer cleaning method and apparatus therefore
LAM RES AG0 citations41
TSCHINDERLE ULRICH
3 patentsUS10269615B2Apr 23, 2019
Apparatus for treating surfaces of wafer-shaped articles
TSCHINDERLE ULRICH1 citations58
US8974632B2Mar 10, 2015
Device and method for treating wafer-shaped articles
TSCHINDERLE ULRICH0 citations48
US9633890B2Apr 25, 2017
Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device
TSCHINDERLE ULRICH1 citations47