Inventor
GRAHAM MATTHEW
US19 patents
⚠️ This page may combine multiple inventors who share the name “GRAHAM MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS9795023B2Oct 17, 2017
Apparatus for and method of source material delivery in a laser produced plasma EUV light source
ASML NETHERLANDS BV3 citations73
US10237960B2Mar 19, 2019
Apparatus for and method of source material delivery in a laser produced plasma EUV light source
ASML NETHERLANDS BV1 citations62
US10681795B2Jun 9, 2020
Apparatus for and method of source material delivery in a laser produced plasma EUV light source
ASML NETHERLANDS BV1 citations61
US9363877B2Jun 7, 2016
System and method to reduce oscillations in extreme ultraviolet light generation
ASML NETHERLANDS BV1 citations51