Inventor
SINGH ANUP KUMAR
US14 patents
⚠️ This page may combine multiple inventors who share the name “SINGH ANUP KUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS10748797B2Aug 18, 2020
Plasma parameters and skew characterization by high speed imaging
APPLIED MATERIALS INC2 citations72
US11721545B2Aug 8, 2023
Method of using dual frequency RF power in a process chamber
APPLIED MATERIALS INC2 citations70
US11996273B2May 28, 2024
Methods of seasoning process chambers
APPLIED MATERIALS INC0 citations61
US11859275B2Jan 2, 2024
Techniques to improve adhesion and defects for tungsten carbide film
APPLIED MATERIALS INC0 citations61
US11545376B2Jan 3, 2023
Plasma parameters and skew characterization by high speed imaging
APPLIED MATERIALS INC0 citations61
US11495440B2Nov 8, 2022
Plasma density control on substrate edge
APPLIED MATERIALS INC0 citations61
US11120976B2Sep 14, 2021
Apparatus and methods for removing contaminant particles in a plasma process
APPLIED MATERIALS INC0 citations61
US10892143B2Jan 12, 2021
Technique to prevent aluminum fluoride build up on the heater
APPLIED MATERIALS INC1 citations61
US12106958B2Oct 1, 2024
Method of using dual frequency RF power in a process chamber
APPLIED MATERIALS INC0 citations60
US12460298B2Nov 4, 2025
Showerhead design to control stray deposition
APPLIED MATERIALS INC0 citations59
US10714319B2Jul 14, 2020
Apparatus and methods for removing contaminant particles in a plasma process
APPLIED MATERIALS INC0 citations51
US10790121B2Sep 29, 2020
Plasma density control on substrate edge
APPLIED MATERIALS INC0 citations50
US10688538B2Jun 23, 2020
Aluminum fluoride mitigation by plasma treatment
APPLIED MATERIALS INC0 citations40