Inventor
LAN HAO-YU
TW4 patents
Patents
4 patentsUS12124178B2Oct 22, 2024
Lithography system and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11675280B2Jun 13, 2023
Lithography system and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11106146B2Aug 31, 2021
Lithography system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10684561B2Jun 16, 2020
Lithography method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50