Inventor
URBAN LUKAS
US5 patents
⚠️ This page may combine multiple inventors who share the name “URBAN LUKAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
3 patentsUS11248295B2Feb 15, 2022
Wafer carrier having retention pockets with compound radii for chemical vapor deposition systems
VEECO INSTR INC3 citations70
US10145013B2Dec 4, 2018
Wafer carrier having retention pockets with compound radii for chemical vapor desposition systems
VEECO INSTR INC4 citations70
US10167571B2Jan 1, 2019
Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems
VEECO INSTR INC2 citations68