Inventor
HARAGUCHI TAKESHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “HARAGUCHI TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANTEST CORP
10 patentsUS6804288B2Oct 12, 2004
Electron beam exposure apparatus and electron beam deflection apparatus
ADVANTEST CORP31 citations92
US6787780B2Sep 7, 2004
Multi-beam exposure apparatus using a multi-axis electron lens, fabrication method of a semiconductor device
ADVANTEST CORP51 citations92
US6465796B1Oct 15, 2002
Charge-particle beam lithography system of blanking aperture array type
ADVANTEST CORP33 citations92
US6703624B2Mar 9, 2004
Multi-beam exposure apparatus using a multi-axis electron lens, electron lens convergencing a plurality of electron beam and fabrication method of a semiconductor device
ADVANTEST CORP15 citations84
US6509568B1Jan 21, 2003
Electrostatic deflector for electron beam exposure apparatus
ADVANTEST CORP15 citations81
US6777694B2Aug 17, 2004
Electron beam exposure system and electron lens
ADVANTEST CORP7 citations73
US6727658B2Apr 27, 2004
Electron beam generating apparatus and electron beam exposure apparatus
ADVANTEST CORP4 citations62
US7919750B2Apr 5, 2011
Electron gun, electron beam exposure apparatus, and exposure method
ADVANTEST CORP6 citations61
US7394068B2Jul 1, 2008
Mask inspection apparatus, mask inspection method, and electron beam exposure system
ADVANTEST CORP0 citations52
US6764925B2Jul 20, 2004
Semiconductor device manufacturing system and electron beam exposure apparatus
ADVANTEST CORP0 citations52