Inventor
FANG HAWREN
US5 patents
⚠️ This page may combine multiple inventors who share the name “FANG HAWREN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS11270430B2Mar 8, 2022
Wafer inspection using difference images
KLA TENCOR CORP5 citations72
US11257207B2Feb 22, 2022
Inspection of reticles using machine learning
KLA TENCOR CORP4 citations71
US10074036B2Sep 11, 2018
Critical dimension uniformity enhancement techniques and apparatus
KLA TENCOR CORP6 citations70
US12094101B2Sep 17, 2024
Inspection of reticles using machine learning
KLA TENCOR CORP0 citations61